5 Common Vacuum Pump Problems in Semiconductor Manufacturing and How to Solve Them In the ultra-precise world of semiconductor manufacturing, vacuum systems are the unsung heroes. They create and maintain the pristine environments necessary for critical processes like chemical vapor deposition (CVD), etching, and ion implantation. However, when a vacuum pump fails or underperforms, it doesn't just cause a minor delay; it can lead to catastrophic yield loss, costly tool downtime, and contamination events that jeopardize entire production batches. This guide details the five most common—and costly—vacuum pump problems in semiconductor fabrication plants (fabs). We'll explore their root causes, provide actionable solutions, and explain how selecting the right pump technology from the start is the most effective preventative strategy.
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